SEMICON China 2025丨Leading with ±0.02mm Precision: The Technological Breakthrough Behind SRT‘s Localized Wafer Transfer Solutions




In 2025, as the global semiconductor industry accelerates its restructuring, China’s domestic semiconductor equipment has entered a critical window of breakthrough. Achieving self‑reliance and control has become a strategic imperative for ensuring the security of the industrial chain. Seizing this opportunity, on March 26, Valfar (WFR), a subsidiary of SRT, made a strong presence at Booth T0222, Hall T0, Shanghai New International Expo Centre, as an “inheritor and enabler of intelligent transmission systems for semiconductor manufacturing,” showcasing its full‑stack solutions for wafer transfer systems.

 

The product matrix exhibited this time includes an arm precision testing platform, wafer transfer equipment, three core components (Robot, LoadPort, Aligner), and a display platform for core components of wafer transfer systems. With a repeatability precision of ±0.02 mm as the benchmark, it demonstrates the hardcore technical strength of China’s semiconductor equipment to the world, marking a new high for domestic high‑end equipment in the “micron‑level precision era.”



 



 The “arm precision demonstration platform” at the center of the booth became the focal point. The RB100 series dual‑arm wafer handling robot achieves a repeatability precision of ±0.02 mm. This figure not only far exceeds the industry average but, thanks to the self‑designed end‑effector, also enables full adaptability to wafers of various materials and thicknesses up to 300 mm.



At the same time, the series covers a variety of models including single‑arm, dual‑arm, end‑effector flip, and water‑resistant types, providing comprehensive wafer transfer solutions for semiconductor manufacturing.

 

 

 

Valfar’s newly launched AEW6000 series EFEM and ASW6000 series Sorter intuitively demonstrate the high‑precision standards of domestic wafer automatic transfer and batch sorting.


Both products are compatible with multiple carrier types such as SEMI‑standard FOUP, FOSB, Open Cassette, and SMIF Pod, and support mixed configuration modes. Optional double‑side code reading and wafer flipping functions confront the challenges of high‑precision transfer and complex process scenarios. The microenvironment maintenance system ensures stability under high‑speed transfer, providing a “seamless upgrade” path for capacity ramping.




 


  


Valfar’s core components display platform for wafer transfer systems, showcased at the exhibition, features selected core products from its family of over 70 models of wafer handling robots. Through live demonstrations of key actions such as lifting and placing, 180‑degree flipping, and edge alignment, the platform fully showcases the precise control capability across the entire transfer process for 6″ to 12″ wafers or glass disks, offering an intuitive technical experience to visitors.

 




As a new entrant, Valfar understands well the industry’s expectations and concerns regarding domestic equipment. Leveraging the interdisciplinary technology integration of SRT Group in fields such as soft robotics and machine vision, Valfar has built a professional semiconductor equipment R&D team (with an average of over 15 years of industry experience), offering customers:


As a core part of SRT’s “Global Innovation Chain” strategy, Valfar will continue to deepen its presence in the high‑end semiconductor equipment field, driving leapfrog development of China’s semiconductor industry from “following” to “leading” through three major technology pathways: precision revolution, ecosystem restructuring, and domestic substitution. We sincerely invite industry peers to visit Booth T0222, Hall T0, to explore the forefront of technology and co‑create the blueprint for intelligent manufacturing!


 

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