| Equipment model • LP100 series Product features • Standard support for FOUP and automatic door FOSB • Unique door opening mechanism and precise motion control can achieve high cleaning performance Technical specifi cation and parameter • Power supply: DC 24V±10% 6A • Compressed air: above 0.5MPa~ 0.6MPa 10L/min • Vacuum air: above -60kPa ~ -80kPa 10L/min • N2:- |
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