Load Port

Description

For the wafer load processing elements for various equipment in semiconductor production process.

performance parameter

Equipment model
• LP100 series

Product features
• Standard support for FOUP and automatic door FOSB
• Unique door opening mechanism and precise motion
control can achieve high cleaning performance

Technical specifi cation and parameter
• Power supply: DC 24V±10% 6A
• Compressed air: above 0.5MPa~ 0.6MPa 10L/min
• Vacuum air: above -60kPa ~ -80kPa 10L/min
• N2:-
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More information download

hotline: 0086+400-186-7770

Business : srt@softrobottech.com


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