晶圆载体机LP160FP

Description

performance parameter

LP160 系列 LoadPort 装载单元是为半导体自动化设备晶圆装载设计的专用设备。产品已通过 SEMI S2 认证。分为三个产品系列,可应对 Semi 标准的 Foup、Fosb、Smif 料盒和用于先进封装洁净型 FrameFoup。 ・ 对 FOUP 和自动门 FOSB 的标准支持 ・ 独特的开门机构和精确的运动控制,可实现高清洁性能

Get Quote

More information download

hotline: 0086+400-186-7770

Business : srt@softrobottech.com

|  Beijing  |  Soft  |  Building 12, No.109 Yard, Jinghai 3rd Road, Beijing Economic-Technological Development Area, Beijing

|  Suzhou  |  Soft  | 5F, Block A, Tianrui Industrial Park, No.1528 Chenfeng Highway, Yangshe Town, Zhangjiagang City, China

|  Suzhou  |  Intelligent  |  No.5 Factory, Shengda Baoluo Science & Technology Entrepreneurship Park, 1919 Fengyang Road, Weitang Town, Xiangcheng District, Suzhou

|  Hangzhou|Soft|5A-4, Building 7, No. 11, Jugong Road, Xixing Street, Binjiang District, Hangzhou City, Zhejiang Province 

|  Suzhou|Bokeshi|Gaorong Building, High-speed Rail New Town, Xiangcheng District, Suzhou City, Jiangsu Province

|  Hefei|Sairuitan|Shui'an Chuanggu Building, No. 1288 Ziyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province

Copyright © 2016-2024 北京软体机器人科技股份有限公司版权所有 京ICP备16032117号-1