LP160 系列 LoadPort 装载单元是为半导体自动化设备晶圆装载设计的专用设备。产品已通过 SEMI S2 认证。分为三个产品系列,可应对 Semi 标准的 Foup、Fosb、Smif 料盒和用于先进封装洁净型 FrameFoup。 ・ 对 FOUP 和自动门 FOSB 的标准支持 ・ 独特的开门机构和精确的运动控制,可实现高清洁性能
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