晶圆搬运机械手RB100SF

Description

RB100 系列 为半导体行业晶圆传输开发的专用机械手,具备完全自主的知识产权,产品已通过 SEMI S2 认证。RB100 具备较为丰富的产品序列,包含了单臂、双臂、末端翻转、防水等不同的机型。

performance parameter

配合自主设计的末端拾取器,可实现 300mm 及以下各种材质和厚度晶圆的可靠传输。 ・ 适用于 300mm 及以下尺寸晶圆传输 ・ 可实现末端自由轨迹和斜插功能 ・ 完全自主知识产权,可客制化订制

Get Quote

More information download

hotline: 0086+400-186-7770

Business : srt@softrobottech.com

|  Beijing  |  Soft  |  Building 12, No.109 Yard, Jinghai 3rd Road, Beijing Economic-Technological Development Area, Beijing

|  Suzhou  |  Soft  | 5F, Block A, Tianrui Industrial Park, No.1528 Chenfeng Highway, Yangshe Town, Zhangjiagang City, China

|  Suzhou  |  Intelligent  |  No.5 Factory, Shengda Baoluo Science & Technology Entrepreneurship Park, 1919 Fengyang Road, Weitang Town, Xiangcheng District, Suzhou

|  Hangzhou|Soft|5A-4, Building 7, No. 11, Jugong Road, Xixing Street, Binjiang District, Hangzhou City, Zhejiang Province 

|  Suzhou|Bokeshi|Gaorong Building, High-speed Rail New Town, Xiangcheng District, Suzhou City, Jiangsu Province

|  Hefei|Sairuitan|Shui'an Chuanggu Building, No. 1288 Ziyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province

Copyright © 2016-2024 北京软体机器人科技股份有限公司版权所有 京ICP备16032117号-1