晶圆搬运机械手RB100DF

Description

RB100 系列 为半导体行业晶圆传输开发的专用机械手,具备完全自主的知识产权,产品已通过 SEMI S2 认证。RB100 具备较为丰富的产品序列,包含了单臂、双臂、末端翻转、防水等不同的机型。

performance parameter

配合自主设计的末端拾取器,可实现 300mm 及以下各种材质和厚度晶圆的可靠传输。 ・ 适用于 300mm 及以下尺寸晶圆传输 ・ 可实现末端自由轨迹和斜插功能 ・ 完全自主知识产权,可客制化订制

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