Model

AG106G

Product Structure

Mechanical clamping type

Sensor type

Reflective optical fiber

Wafer speclflcatlons

6"

Time required to determine position

2.5s (no re-clamping action is performed)

Position accuracy

Wafer center: within ±0.3mm, Notch positioning: within ±0.3°

Working scope

±5mm

Wafer holding method

Mechanical edge gripping

Wafer hold check

Limited reflection type optical fiber sensor (2 locations)

Control communication methods

RS232/RS485/TCP/IP

Power supply

DC24V 2A

Negative pressure

-