From September 4 to 6, the 13th China Semiconductor Equipment and Core Components and Materials Exhibition (CSEAC 2025) was successfully held in the Taihu Lake International Expo Center in Wuxi. Beijing Weifal Semiconductor Technology Co., Ltd. (hereinafter referred to as "WFR"), a subsidiary of SRT, showcased its independently developed wafer transfer core components and process equipment at booth A1-99 in Hall A1, showcasing the company's technological strength and innovative achievements in the field of semiconductor equipment localization.
Localization substitution
The only way for the semiconductor industry to be independent and controllable
Against the backdrop of a deep adjustment in the global semiconductor industry landscape, promoting the localization and substitution of semiconductor equipment has become an important step in building the integrity of the domestic industrial chain. As an important layout of SRT Group in the semiconductor equipment field, WFR relies on the group's comprehensive R&D and implementation capabilities in the industrial automation field, focusing on the R&D and manufacturing of semiconductor wafer transfer core components, transfer equipment, and back-end film process equipment. It is committed to breaking foreign technological monopolies and promoting the independent and controllable process of domestic semiconductor equipment.
Technological breakthrough
High precision transmission and autonomous core components
At this exhibition, WFR highlighted the RB100 series wafer handling robotic arm, which has a repeatability accuracy of ± 0.06mm (up to ± 0.02mm); By using self-designed end pickers, wafer handling of different sizes, materials, and thicknesses can be achieved. The variety of robotic arm models can fully cover the demanding transmission scenarios such as etching, deposition, cleaning, and testing, achieving stable and reliable wafer handling.
The ASW6000 series Sorter exhibited at the same time is a wafer sorting equipment with completely independent intellectual property rights of WFR, and both the AEW6000 series EFEM (Equipment Front End Transport) and ASW6000 series EFEM use WFR's self-developed core components. Based on the autonomous technology of core components such as Robot, LoadPort, Aligner, Fork, etc., WFR has the unique advantage of multi scenario compatibility and can seamlessly integrate with various loading units such as FOUP, FOSB, OpenCassette, and SMIFPod. The device supports a "mixed configuration" mode, which can flexibly respond to production line switching needs. The ultra-thin wafer transfer technology developed by WFR can achieve high-speed and stable independent or compatible transfer of 12 inch ultra-thin wafers and Taiko wafers. The microenvironment maintenance system optimized through fluid analysis can achieve a stable Class 1 clean environment.
Product matrix
Full stack self-developed and improved industrial layout
WFR has formed a complete product system in the core component field, covering more than 70 models. The Aligner AG100 series wafer calibration equipment exhibited this time supports two loading modes: vacuum adsorption and edge contact, and is suitable for the calibration requirements of wafers with a thickness of 300mm or less; The RB100V atmospheric wafer transfer robot is completely independently designed and can achieve stable and reliable handling of wafers of 300mm and below in high cleanliness environments; The LoadPort LP160 series wafer loading unit is a specialized equipment designed for semiconductor automation equipment wafer loading, compatible with different types of material boxes such as SEMI standard FOUP, FOSB, Frame FOUP, Smif, OpenCasette, etc. It can also be customized and developed according to user needs.
Based on deep cultivation of semiconductor manufacturing processes, WFR has achieved comprehensive layout in the field of downstream process equipment. The key process equipment developed by the company, such as vacuum film sticking, ultra-thin wafer peeling, UV debonding, and cracking, has highly modular design and process adaptation capabilities, providing customers with more cost-effective domestic choices.
Technical background
SRT Group empowers semiconductor equipment innovation
As an industrial service enterprise with software robot technology as its core, SRT Group has always been guided by technology inclusiveness, and has formed a product matrix and solutions including industrial end effectors, digital production equipment and solutions, semiconductor wafer transmission core components and transmission equipment, medical rehabilitation exoskeleton robots, education and training equipment, etc. It also provides interdisciplinary technical support and innovation momentum for WFR.
The WFR R R&D team has an average of over 15 years of industry experience. With technological innovation in semiconductor processes, they have gradually built a product system with "independent design, lean manufacturing, and full service" as the core competitiveness, enabling WFR to quickly respond to market demand and provide customers with high-quality localized solutions.
In addition, during the exhibition, the WFR technical team provides professional technical consultation and customized solutions based on the actual needs of customers. In the future, WFR will continue to adhere to the development strategy of research and development innovation and customer orientation, continuously deepen its technological layout in the field of semiconductor transmission and process equipment, and help China's semiconductor industry chain achieve safer, more efficient, and more independent high-quality development through precision improvement, reliability enhancement, and cost optimization.