Shanghai, March 25, 2026 – SEMICON China 2026, the global semiconductor industry’s annual curtain-raiser, commenced at the Shanghai New International Expo Centre. As the world’s largest and premier-tier semiconductor exhibition, this edition brings together 1,500 exhibitors spanning over 100,000 square meters of exhibition space, establishing itself as a pivotal platform for tracking industry trends and connecting global resources.
Double exhibitions sing together, blooming on the same ground: SRT's MicroFarr (WFR) Showcases Full-Stack Wafer Handling Innovations at SEMICON China Shanghai, March 25, 2026 – At Booth T3211 in Hall T3 of SEMICON China 2026, SRT subsidiary MicroFarr (WFR) demonstrated its fully self-developed wafer handling core components, highlighting domestic technological breakthroughs in critical semiconductor equipment.
Concurrently, SRT Group exhibited at productronica China in Hall W2 of the same venue.
This exhibition aligns with China’s elevated industrial policy framework. The 2026 Government Work Report prioritized integrated circuits as the foremost of six emerging pillar industries. The 15th Five-Five Year Plan" emphasizes developing new quality productive forces and advancing original innovation across the chain – particularly in core technologies for ICs, Industrial Mother Machine, and high-end instruments. Against this backdrop, import
substitution has evolved from an optional strategy to an imperative for supply chain autonomy.Within this framework Import substitution has transitioned from an optional pathway to a strategic imperative for supply chain autonomy."
As SRT Group's strategic semiconductor equipment division, MicroFarr (WFR) positions itself as the 'Pioneer of semiconductor intelligent transmission system craftsmanship,' focusing on R&D and manufacturing of core wafer handling components, transport equipment, and post-process film fabrication tools. Leveraging SRT's cross-disciplinary expertise in industrial automation, soft robotics, and machine vision, the company has forged core competencies in autonomous design, precision manufacturing, and end-to-end service delivery – committed to resolving critical wafer process handling challenges with proprietary technologies."
In the core components sector, MicroFarr (WFR) has established a product portfolio encompassing over 70 models:
1
The RB100 Series Wafer Handling Robot achieves a repeat positioning accuracy of ±0.06mm (up to ±0.02mm). Its self-developed wafer-specific end effector adapts to wafers of varying dimensions, materials, and thicknesses, supporting critical process stages including etching, deposition, cleaning, and testing.
2
The RB100V Ambient Wafer Transfer Robot, entirely self-designed by SRT, enables stable and reliable handling of wafers up to 300mm in high-cleanliness environments.
3
The AG100 Series Wafer Alignment Equipment supports dual loading modes: vacuum chucking and edge contact alignment, catering to diverse process requirements.
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The LP160 Series Wafer Load Port is engineered for semiconductor automation equipment, with compatibility across multiple cassette types.
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At the equipment level, the fully self-developed ASW6000 Series Sorter (Wafer Sorter) and AEW6000 Series EFEM (Equipment Front End Module) leverage proprietary technologies in core components including Robots, Load Ports, Aligners, and Forks. These systems enable seamless interoperability with FOUP, FOSB, Open Cassette, and SMIF Pod load units while supporting hybrid configurations. Equipped with in-house ultra-thin wafer handling technology, the equipment achieves high-speed stable transfer of 12-inch ultra-thin wafers and Taiko wafers, with micro-environment systems maintaining Class 1 cleanliness per SEMI E4-0326 standard."
At the process level, company has strategically deployed key process equipment including vacuum laminators, ultra-thin wafer debonders, UV decapsulation systems, and dicing machines. These solutions deliver cost-effective localized alternatives for advanced packaging and testing applications.
During this year's Two Sessions, delegates highlighted the semiconductor industry's accelerated shift from 'addressing weaknesses through substitution' to 'building innovation-driven excellence.' This transformation equally applies to semiconductor equipment. MicroFarr's (WFR) R&D team possesses an average of over 15 years of semiconductor industry experience. Our robust technical prowess is empowering the evolution of localized equipment from 'functional alternatives' to 'trusted solutions.''
From March 25 to 27, MicroFarr's (WFR)senior technical team and industry solution specialists will be stationed at Booth T3211 (Hall T3) throughout the exhibition. We invite industry partners to visit for one-on-one technical consultations, solution validation, and scenario-specific customization services. This space transcends a product showcase – it's a live technology proving ground for collaborative innovation."