LP160S

Description

The LP160 Series LoadPort is a dedicated loading unit designed for semiconductor automation equipment, for the wafer load processing elements for various equipment in semiconductor production process, and it supports Semi-standard Open Cassette, FOUP, FOSB, SMIF pod, and clean Frame FOUP for advanced packaging.

performance parameter

• Features wafer mapping, protrusion, stacking, and misalignment detection

• User-friendly touch control operation

• Compliant with SEMI S2 standards

Product Specifications

Model	LP160S
Wafer size	8"
Carrier type	8" SMIF Cassette
Size	470X425X1270mm (WxDxH)
Cleanliness	Class 1@0.1um
Operation time	With mapping
	FOUP Open:18sec
	FOUP Close:10sec
Cover opening method	Lower lid
Communication	RS232/RS485/ETHERNET
Optional component	RFID TI134kHz
Optional component	AMHS Communication Port（E84)
Power supply	DC24V 2A
Negative pressure	-50～-80Kpa
Positive pressure	0.6～ -0.7Mpa
Weight	70Kg

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LP160S

Description

performance parameter

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