AG126S

Description

Designed for wafer alignment in semiconductor production processes, it handles 6" to 12" wafers, including conventional, transparent, and semi-transparent wafers.

performance parameter

• High-speed, high-precision centering and notch positioning

• Compatible with transparent, semi-transparent, and opaque wafers

• Customizable development

• Compliant with SEMI S2 standards

Product Specifications

Model	AG126S
Product Structure	Vacuum suction type
Sensor type	Linear sensor
Wafer speclflcatlons	6"-8"-12"
Time required to determine position	3s (excluding wafer loading and unloading time)
Position accuracy	Wafer center: within ±0.1mm, Notch positioning: within ±0.1°
Working scope	±7mm
Wafer holding method	Back vacuum adsorption
Wafer hold check	Comes with digital display vacuum sensor
Control communication methods	RS232/RS485/TCP/IP
Power supply	DC24V 2A
Negative pressure	≤ -53Kpa

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AG126S

Description

performance parameter

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